TY  - SER
AU  - Einspruch, Norman G.
AU  - Huff, Howard
TI  - VLSI electronics microstructure science: Silicom materials
SN  - 012234112
U1  - 621.38195835 
PY  - 1985///
CY  - New York
PB  - Academic 
KW  - Computer science
ER  -